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Volumn 394, Issue 1-2, 2001, Pages 96-100

Highly (111) oriented lead zirconate titanate thin films deposited using a non-polymeric route

(5) Zai, M H M a Akiba, A a Goto, H a Matsumoto, M a Yeatman, E M b

b IMPERIAL COLLEGE LONDON (United Kingdom)

Author keywords

Ferroelectric; Lead zirconate titanate; Metallo organic decomposition; Non polymeric; Piezoelectric; Rapid thermal annealing

Indexed keywords

COERCIVE FORCE; CRYSTAL ORIENTATION; CRYSTALLIZATION; ELECTRIC PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; ORGANIC SOLVENTS; RAPID THERMAL ANNEALING; SEMICONDUCTING LEAD COMPOUNDS; SILICON WAFERS; SOL-GELS; SOLUTIONS; VISCOSITY; X RAY DIFFRACTION ANALYSIS; XYLENE;

LEAD ZIRCONATE TITANATE (PZT) THIN FILMS;

FERROELECTRIC THIN FILMS;

EID: 0035881437 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/s0040-6090(01)01136-1 Document Type: Article

Times cited : (9)

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