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Journal of Applied Physics

Volumn 89, Issue 8, 2001, Pages 4294-4300

Elastic properties, intrinsic and photoinduced stress in hydrogenated amorphous-silicon thin films with different hydrogen content

(4) Spanakis, E b Stratakis, E b Tzanetakis, P b Wang, Qi a

a NATIONAL RENEWABLE ENERGY LABORATORY (United States)

b NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035871249 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1353807 Document Type: Article

Times cited : (29)

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