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Volumn 34, Issue 14, 2001, Pages 2191-2204
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A modified pseudo-equilibrium model competing with kinetic models to determine the composition of a two-temperature SF6 atmosphere plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
CARRIER CONCENTRATION;
COMPOSITION;
GASES;
IONIZATION OF SOLIDS;
MATHEMATICAL MODELS;
REACTION KINETICS;
SULFUR COMPOUNDS;
TEMPERATURE MEASUREMENT;
ATMOSPHERE PLASMA;
ELECTRON FLUX;
PSEUSO EQUILIBRIUM MODEL;
SULPHUR HEXAFLUORIDE;
THERMAL PLASMA;
PLASMAS;
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EID: 0035859471
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/34/14/315 Document Type: Article |
Times cited : (36)
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References (44)
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