On the determination of the multi-temperature SF6 plasma composition

Journal of Physics D: Applied Physics

Volumn 32, Issue 15, 1999, Pages 1851-1856

  Cliteur, G J ^a   Suzuki, K ^a   Tanaka, Y ^b   Sakuta, T ^b   Matsubara, T ^c   Yokomizu, Y ^c   Matsumura, T ^c  

^a TOSHIBA CORPORATION   (Japan)

^b KANAZAWA UNIVERSITY   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPOSITION; DISSOCIATION; ELECTRIC EXCITATION; IONIZATION; NUMERICAL METHODS; REACTION KINETICS; TEMPERATURE; THERMAL EFFECTS;

ELECTRON TEMPERATURE; MULTI TEMPERATURE SAHA EQUATION; PLASMA COMPOSITION;

PLASMAS;

EID: 0032670360     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/15/313     Document Type: Article

References (10)

1. Potapov A V 1966 Chemical equilibrium of multitemperature systems High Temp. 4 48
2. JANAF Thermochemical Tables 1985 J. Phys. Chem. Ref. Data 14
3. Herzberg G 1979 Molecular Spectra and Molecular Structure II (New York: Van Nostrand Reinhold)
4. Brand K P and Kopainsky J 1978 Particle densities in a decaying SF6 plasma Appl. Phys. 16 425-32
5. van de Sanden M C M, Schram P P J M and Peeters A G 1989 Thermodynamic generalization of the Saha equation for a two-temperature plasma Phys. Rev. A 40 5273-6
6. 6 plasma with electron temperature greater than the gas temperature IEEE Trans. Plasma Sci. 25 991-5
7. Herzberg G 1979 Molecular Spectra and Molecular Structure IV (New York: Van Nostrand Reinhold)
8. Moore C E 1949 Atomic Energy Levels (Washington DC: NBS)
9. 2 arc modeling around current zero J. Phys. D: Appl. Phys. 32 478
10. Richley E and Tuma D T 1982 On the determination of particle concentrations in multitemperature plasmas Appl. Phys. 53 8537