Grazing-emission electron probe microanalysis of particles near the substrate edge

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 56, Issue 12, 2001, Pages 2385-2395

  Bekshaev, Aleksandr ^a   De Hoog, Johan ^a   Van Grieken, René ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Electron probe microanalysis; Grazing exit; Inhomogeneous substrate; Particle analysis; Structure investigation

Indexed keywords

CALCIUM COMPOUNDS; ELECTROMAGNETIC WAVE REFLECTION; MICROANALYSIS; NITRIC ACID; SEMICONDUCTING SILICON; SUBSTRATES; X RAY ANALYSIS;

ELECTRON PROBE MICROANALYSIS;

ELECTRON BEAMS;

EID: 0035841915     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(01)00300-7     Document Type: Article

References (16)

1. Grazing exit electron probe microanalysis for surface and particle analysis
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3. Detection limits of grazing-exit EPMA for particle analysis
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5. Calculation of intensities in grazing-emission X-ray fluorescence
6. X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92
7. Observation of an interference effect for fluorescent X-rays
8. Analysis of X-ray spectra by Iterative Least square (AXIL): New developments
9. A comprehensive theory of electron probe microanalysis
10. Determination of low-Z elements in individual environmental particles using windowless EPMA
11. Refracted X-rays propagating near the surface under grazing incidence condition
12. X-ray waveguide phenomenon in thin layers under grazing incidence conditions