Dissociation energy of the passivating hydrogen-aluminum complex in 4H-SiC

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 427-430

  Janson, M S ^a   Hallen A ^a   Linnarsson, M K ^a   Nordell, N ^a   Karlsson, S ^b   Svensson, B G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIFFUSION IN SOLIDS; DISSOCIATION; DOPING (ADDITIVES); FREQUENCIES; HYDROGEN; PASSIVATION; THERMODYNAMIC STABILITY;

ARRHENIUS EQUATION; DISSOCIATION ENERGY;

SILICON CARBIDE;

EID: 14344271944     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.353-356.427     Document Type: Article

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