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Volumn 141, Issue 1, 2001, Pages 88-95
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Low-pressure chemical vapour deposition of mullite layers using a cold-wall reactor
b
CEMES CNRS
(France)
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Author keywords
Chlorides precursors; cold wall reactor; Low pressure chemical vapour deposition; Mullite
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Indexed keywords
ALUMINUM COMPOUNDS;
COATINGS;
COMPOSITION;
CRYSTAL MICROSTRUCTURE;
CRYSTAL STRUCTURE;
ELECTRON DIFFRACTION;
MORPHOLOGY;
SILICON COMPOUNDS;
MULLITE COATINGS;
CHEMICAL VAPOR DEPOSITION;
COATING;
CORROSION PREVENTION;
HIGH TEMPERATURE CORROSION;
MULLITE;
VAPOR DEPOSITION;
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EID: 0035806215
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01132-X Document Type: Article |
Times cited : (10)
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References (36)
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