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Volumn 141, Issue 1, 2001, Pages 88-95

Low-pressure chemical vapour deposition of mullite layers using a cold-wall reactor

Author keywords

Chlorides precursors; cold wall reactor; Low pressure chemical vapour deposition; Mullite

Indexed keywords

ALUMINUM COMPOUNDS; COATINGS; COMPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; MORPHOLOGY; SILICON COMPOUNDS;

EID: 0035806215     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01132-X     Document Type: Article
Times cited : (10)

References (36)
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    • Ph. D. Thesis, Pennsylvania State University Park, PA
    • (1990)
    • Marple, B.R.1
  • 28
    • 0004883909 scopus 로고
    • Thesis, University of Montpellier H
    • (1992) , pp. 53-64
    • Labatut, C.1
  • 30
    • 0004887295 scopus 로고
    • Thesis, University of Bordeaux I Chp
    • (1984) , vol.3 , pp. 1-14
    • Colmet, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.