Low pressure chemical vapour deposition of AlN-Si3N4 codeposits

Journal of the European Ceramic Society

Volumn 17, Issue 15-16, 1997, Pages 1803-1806

  Henry, F ^a   Armas, B ^a   Berjoan, R ^a   Combescure, C ^a   Dupuy, C ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004822323     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(97)00072-1     Document Type: Article

References (13)

1. Billy, M., Jarrige, J., Lecompte, J. P., Mexmain, J. and Yefsah, S., Comportement à l'oxydation du nitrure d'aluminium fritte: Rev. Chim. Min. 1982, 19, 673-683.
2. Aspar, B., Rodriguez-Clemente, R., Figueras, A., Armas, B. and Combescure, C., Influence of the experimental conditions on the morphology of CVD AlN films. Journal of Crystal Growth, 1993, 129, 56-66.
3. Pauleau, Y., Hantzpergue, J. J. and Remy, J. C., Les couches minces de nitrure d'aluminium. Bull. Soc. Chim. France, 1979, 5-6, 199-214.
4. Yim, W. M., Sotofko, E. J., Zanzucchi, P. J., Pankove, J. I., Ettenberg, M. and Gilbert, S. L., Epitaxially grown AlN and its optical band gap. Journal of Appl. Phys., 1973, 44, 292.
5. Niihara, K. and Hirai, T., Chemical vapour deposited silicon nitride. Part 1. Preparation and some properties. Journal of Mater. Sci., 1976, 11, 593-603.
6. Singhal, S. C., Thermodynamics and kinetics of oxidation of hot-pressed silicon nitride. Journal of Mater. Science, 1976, 11, 500-509.
7. 4 at 1550 to 1650°C. Journal of Am. Ceram. Soc., 1980, 63(7/8), 419-424.
8. 4, obtenu par LPCVD, soumis à des flux radiatifs intenses. Journal de Physique, C5, 1989, 50, 353-362.
9. 4 codeposits using the LPCVD technique. Journal de Physique IV, C3, Suppl. II, 1993, 3, 519-526.
10. 4 codeposits. Journal of de Physique IV, C5, Suppl. II, 1995, 5, 785-792.
11. Henry, F., Armas, B., Combescure, C., Figueras, A. and Garelik, S., βSiC deposition by hot wall LPCVD using tetramethylsilane. Surface and Coating Technology, 1996, 80, 134-138.
12. 4) codeposits obtained by LPCVD. Journal de Physique IV, C5, Suppl. II, 1995, 5, 905-912.
13. Wagner, C. D., in Practical Surface Analysis, ed. D. Briggs and M. P. Seah, J. Wiley and Sons Ltd, Chichester, 1983, Appendix 4, p. 477.