Deposition of aluminium nitride coatings using a cold wall CVD reactor

Surface and Coatings Technology

Volumn 123, Issue 2-3, 2000, Pages 199-203

  Armas, B ^a   De Icaza Herrera, M ^a   Sibieude, F ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

Aluminium nitride; Chemical vapour deposition

Indexed keywords

COATING; CORROSION RESISTANCE; HIGH TEMPERATURE APPLICATION; VAPOR DEPOSITION;

ALUMINUM COMPOUNDS; CHEMICAL ACTIVATION; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; NITRIDES; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; COLD WALL REACTORS; HIGH FREQUENCY INDUCTION;

DIFFUSION COATINGS;

EID: 0033883154     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00510-1     Document Type: Article

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