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Volumn 395, Issue 1-2, 2001, Pages 310-314
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Growth of device quality p-type μc-Si:H films by hot-wire CVD for a-Si pin and c-Si heterojunction solar cells
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Author keywords
Dark conductivity; Hot wire CVD; Microcrystalline; Solar cells
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Indexed keywords
ACTIVATION ENERGY;
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
CURRENT VOLTAGE CHARACTERISTICS;
FILM GROWTH;
HETEROJUNCTIONS;
SEMICONDUCTING SILICON;
SOLAR CELLS;
SUBSTRATES;
THICK FILMS;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
DARK CONDUCTIVITY;
HOT WIRE DEPOSITION;
SEMICONDUCTING FILMS;
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EID: 0035801182
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(01)01283-4 Document Type: Conference Paper |
Times cited : (19)
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References (18)
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