A bulk micromachined vibrating wheel rate gyroscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 54-58

  Zhang, Rong ^a   Gao, Zhongyu ^a   Chen, Zhiyong ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Dissolve wafer process; Micromachined vibrating gyroscope; Nonlinear vibration; Passive switched demodulator; Phase lock and amplitude Control

Indexed keywords

ASPECT RATIO; BANDWIDTH; CAPACITORS; DEMODULATORS; GYROSCOPES; PHASE LOCKED LOOPS;

PASSIVE SWITCHED DEMODULATORS;

MICROMACHINING;

EID: 0035772637     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444747     Document Type: Conference Paper

References (7)

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4. th Academic Conference on Inertial Technology, p 134-138, Beihai P.R. China, 1999.
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