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Volumn 37, Issue 4, 2001, Pages 78-81
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Nonlinear mechanical characteristics in micromachine vibratory sensor
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Author keywords
Micromachine; Microsensor; Nonlinear vibration
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Indexed keywords
DATA REDUCTION;
MICROMACHINING;
NONLINEAR SYSTEMS;
VIBRATIONS (MECHANICAL);
NONLINEAR VIBRATIONS;
MICROSENSORS;
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EID: 0035302817
PISSN: 05776686
EISSN: None
Source Type: Journal
DOI: 10.3901/jme.2001.04.078 Document Type: Article |
Times cited : (7)
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References (4)
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