Self-compensating interface system for high-performance MEMS inertial sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2722, Issue , 1996, Pages 145-154

  Burstein, Amit ^a   Kaiser, William J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACCELEROMETERS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROGYROSCOPES;

CMOS INTEGRATED CIRCUITS; ELECTROMECHANICAL DEVICES; GYROSCOPES; NAVIGATION; PERFORMANCE;

SENSORS;

EID: 0029748807     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)