Tunable diffractive optical elements for hard x-rays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4499, Issue , 2001, Pages 96-104

  David, Christian ^a   Nöhammer, Bernd ^a   Ziegler, Eric ^b   Hignette, Olivier ^b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Beam splitter; Coherence; Decoherer; Electron beam lithography; Interferometry; Wet etching; Zone plate

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ETCHING; FOCUSING; INTERFEROMETRY; LENSES; OPTICAL BEAM SPLITTERS; OPTICAL FIBER FABRICATION; PHOTONS; SUBSTRATES; SYNCHROTRON RADIATION;

CHEMICAL WET ETCHING; FRESNEL LENS; HARD X RAY OPTICS; LINEAR GRATINGS; PHASE SHIFTING STRUCTURE; TWO-DIMENSIONAL FOCUSING;

X RAY OPTICS;

EID: 0035767655     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450226     Document Type: Article

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