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Volumn 4499, Issue , 2001, Pages 126-133

PSF measurement of imaging detectors with an X-ray microbeam

Author keywords

FZP; Point spread function; SPring 8; X ray imaging detector; X ray microbeam

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTRONS; FOCUSING; IMAGE SENSORS; IMAGING TECHNIQUES; MAGNETIC LENSES; OPTICAL VARIABLES MEASUREMENT; X RAY CAMERAS; X RAY OPTICS;

EID: 0035766176     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.450230     Document Type: Article
Times cited : (26)

References (8)
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    • (1998) J. Opt. Soc. Am. A , vol.15 , Issue.7 , pp. 1940-1951
    • Koch, A.1    Raven, C.2    Spanne, P.3    Snigirev, A.4
  • 3
    • 0029952099 scopus 로고    scopus 로고
    • A compound refractive lens for focusing high-energy x-rays
    • A. Snigirev, V. Kohn, I. Snigireva, B. Lengeler, "A compound refractive lens for focusing high-energy x-rays," Nature 384, pp. 49-51, 1996.
    • (1996) Nature , vol.384 , pp. 49-51
    • Snigirev, A.1    Kohn, V.2    Snigireva, I.3    Lengeler, B.4
  • 4
    • 0003866738 scopus 로고    scopus 로고
    • X-ray microbeam with sputtered-sliced Fresnel zone plate at SPring-8 undulator beamline
    • W. Meyer-Ilse, T. Warwick, and D. Attwood, ed; American Institute of Physics, New York
    • Y. Suzuki, M. Awaji, Y. Kohmura, A. Takeuchi, N. Kamijo, S. Tamura, and K. Handa, "X-ray microbeam with sputtered-sliced Fresnel zone plate at SPring-8 undulator beamline," in proc. Sixth Int. Conf. of X-ray Microscopy, W. Meyer-Ilse, T. Warwick, and D. Attwood, ed., pp. 535-538, American Institute of Physics, New York, 2000.
    • (2000) Proc. Sixth Int. Conf. of X-ray Microscopy , pp. 535-538
    • Suzuki, Y.1    Awaji, M.2    Kohmura, Y.3    Takeuchi, A.4    Kamijo, N.5    Tamura, S.6    Handa, K.7
  • 5
    • 0001129090 scopus 로고    scopus 로고
    • Process optimization for production of sub-20nm soft x-ray zone plates
    • S. Spector, C. Jacobsen, and D. Tennant, "Process optimization for production of sub-20nm soft x-ray zone plates," J. Vac. Sci. and Technol. B 15(6) pp. 2872-2876, 1997.
    • (1997) J. Vac. Sci. and Technol. B , vol.15 , Issue.6 , pp. 2872-2876
    • Spector, S.1    Jacobsen, C.2    Tennant, D.3
  • 7
    • 0035269844 scopus 로고    scopus 로고
    • Diffraction-limited microbeam with fresnel zone plate optics in hard x-ray regions
    • Y. Suzuki, A. Takeuchi, H. Takano, T. Ohigashi, and H. Takenaka, "Diffraction-Limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions," Jpn. J. Appl. Phys. 40, pp. 1508-1510, 2001.
    • (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 1508-1510
    • Suzuki, Y.1    Takeuchi, A.2    Takano, H.3    Ohigashi, T.4    Takenaka, H.5
  • 8
    • 0035763341 scopus 로고    scopus 로고
    • X-ray imaging microscope with a partial coherent illumination
    • A. Takeuchi, H. Takano, K. Uesugi, and N. Yagi, "X-ray imaging microscope with a partial coherent illumination," to be published in Proc. SPIE, 2001.
    • (2001) Proc. SPIE
    • Takeuchi, A.1    Takano, H.2    Uesugi, K.3    Yagi, N.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.