Diffraction-limited microbeam with Fresnel zone plate optics in hard X-ray regions

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 3 A, 2001, Pages 1508-1510

  Suzuki, Yoshio ^a   Takeuchi, Akihisa ^a   Takano, Hidekazu ^a   Ohigashi, Takuji ^b   Takenaka, Hisataka ^c  

^a Institute of Physical and Chemical Research   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

^c NTT Advanced Technology Corporation   (Japan)

Author keywords

Fresnel zone plate; Microbeam; Scanning microscopy; Synchrotron radiation; X ray microscopy

Indexed keywords

DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; MONOCHROMATORS; OPTICAL RESOLVING POWER; SCANNING; SPATIAL VARIABLES CONTROL; SYNCHROTRON RADIATION; TANTALUM; X RAY MICROSCOPES; X RAY OPTICS;

FRESNEL ZONE PLATE (FZP) OPTICS; MICROBEAMS;

GEOMETRICAL OPTICS;

EID: 0035269844     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1508     Document Type: Article

References (19)