Micromirror arrays for wavefront correction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 348-357

  Gehner, Andreas ^a   Wildenhain, Michael ^a   Lakner, Hubert K ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

Adaptive optics; Micromechanical mirror device; Moems; Piston type mirror elements; Spatial light modulator; Surface micromachining; Wavefront correction

Indexed keywords

ADAPTIVE OPTICS; MICROMETERS; MIRRORS; SURFACE MICROMACHINING;

APPROPRIATE DESIGNS; DEFORMATION CHARACTERISTICS; ELECTROMECHANICAL BEHAVIOR; EXPERIMENTAL INVESTIGATIONS; OPTICAL CROSS SECTIONS; SURFACE PROFILE MEASUREMENTS; WAVEFRONT CORRECTION; WHITE-LIGHT INTERFEROMETRY;

WAVEFRONTS;

EID: 85088396791     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396506     Document Type: Conference Paper

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