A single layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4559, Issue , 2001, Pages 5-16

  Kranz, Michael ^a   Hudson, Tracy ^b,d   Ashley, Paul ^b   Ruffin, Paul ^b   Burgett, Sherrie ^b   Temmen, Mark ^c   Tuck, Jerry ^c  

^a Stanley Associates Inc   (United States)

^b US Army Aviation and Missile Command   (United States)

^c AEgis Technologies Group   (United States)

^d AMSAM RD WS ST   (United States)

Author keywords

MEMS; Sigma Delta Modulator; Silicon On Insulator; Vibratory Rate Gyroscope

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; DELTA SIGMA MODULATION; ELECTRONIC GUIDANCE SYSTEMS; FEEDBACK CONTROL; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; READOUT SYSTEMS; SILICON ON INSULATOR TECHNOLOGY; VIBRATIONS (MECHANICAL);

VIBRATORY-RATE GYROSCOPES;

GYROSCOPES;

EID: 0035763549     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443029     Document Type: Article

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