Calibration of a vertical-scan long trace profiler at MSFC

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4451, Issue , 2001, Pages 333-339

  Gubarev, Mikhail ^a   Kester, Thomas ^b   Takacs, Peter Z ^c  

^a HUGHES STX CORPORATION   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c NASA MARSHALL SPACE FLIGHT CENTER   (United States)

Author keywords

Accuracy; Calibration; Long trace profiler; Systematic error

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; FOURIER TRANSFORMS; INTERFEROMETRY; MIRRORS; PROFILOMETRY; SURFACE MEASUREMENT; SYSTEMATIC ERRORS;

GRAZING INCIDENCE MIRROR; LONG TRACE PROFILER;

OPTICAL SYSTEMS;

EID: 0035761207     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.453648     Document Type: Article

References (5)

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3. Shinan Qian, Glovanni Sostero, Peter Z. Takacs. "Precision calibration and systematic error reduction in the long trace profiler," Opt. Eng. 39(1) 303-310, 2000.
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