Design, characterization and applications of multilayer micro-optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4437, Issue , 2001, Pages 40-49

  Grunwald, Ruediger ^a   Nerreter, Stefan ^a   Griebner, Uwe ^a   Kühn, Hans Joachim ^b  

^a MAX BORN INSTITUT   (Germany)

^b Quarterwave GmbH   (Germany)

Author keywords

Graded AR coatings; Micro mirrors; Micro optics; Multilayer; Nonuniform; Thin films

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; INTERFEROMETRY; LASER RESONATORS; LIGHT INTERFERENCE; LIGHT REFRACTION; MASKS; MIRRORS; MULTILAYERS; OPTICAL DESIGN; OPTICAL RESONATORS; SOLID STATE LASERS; THIN FILMS;

MASK-SHADED VACUUM DEPOSITION; MULTILAYER MICRO-OPTICS;

MICROLENSES;

EID: 0035759366     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448158     Document Type: Article

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