Impact of high order aberrations on the performance of the aberration monitor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Dirksen, P ^a   Juffermans, C ^a   Engelen, A ^a   De Bisschop, P ^a   Muellerke, H ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; LENSES; LINEAR EQUATIONS; MATHEMATICAL MODELS;

ZERNIKE COEFFICIENTS;

PHOTOLITHOGRAPHY;

EID: 0033684522     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)