Application of blazed gratings for determination of equivalent primary azimuthal aberrations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3679, Issue I, 1999, Pages 70-76

  Kirk, J P ^a   Progler, C J ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; DIFFRACTION GRATINGS; OPTICAL INSTRUMENT LENSES;

BLAZED GRATINGS;

PHOTORESISTS;

EID: 0032680146     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.354375     Document Type: Conference Paper

References (5)