Quantitative optical measurement of microcantilever vibration: Applications to near-field microsensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4400, Issue , 2001, Pages 90-101

  Vairac, Pascal ^a   Rousier, Rodrigue ^a   Patois, Raphaël ^a   Cretin, Bernard ^a  

^a Laboratoire de Physique et Metrologie des Oscillateurs du CNRS   (France)

Author keywords

Heterodyne laser probe; MEMS; Microcantilever; Optical detection; Vibration analysis

Indexed keywords

ACOUSTIC DEVICES; ATOMIC FORCE MICROSCOPY; DAMPING; ELASTIC MODULI; HARMONIC GENERATION; HETERODYNING; LASER APPLICATIONS; MICROSENSORS; NATURAL FREQUENCIES; OPTICAL VARIABLES MEASUREMENT; RESONATORS; VIBRATIONS (MECHANICAL);

FORCE MODULATION MICROSCOPY (FMM); MICROCANTILEVER VIBRATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035758678     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.445591     Document Type: Article

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