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Journal of Photopolymer Science and Technology

Volumn 14, Issue 1, 2001, Pages 91-100

Mass spectrometric characterization of pulsed inductively coupled plasmas for deposition of thin polyethylene glycol-like polymer films

(5) Shamamian, Vasgen A a Hinshelwood, David D a Guerin, Daniel C a Denes, Ferencz S b Manolache, Sorin b

a NAVAL RESEARCH LABORATORY (United States)

b UNIVERSITY OF WISCONSIN (United States)

Author keywords

PECVD; Plasma mass spectrometry; Plasma polymerization; RF plasmas

Indexed keywords

MACROGOL; POLYMER;

ARTICLE; CHEMICAL BINDING; CORRELATION ANALYSIS; DIFFUSION; FILM; IONIZATION; MASS SPECTROMETRY; PREDICTION; SURFACE PROPERTY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0035747304 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.14.91 Document Type: Article

Times cited : (5)

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