Radiated fields of rectangular air-coupled micromachined transducers

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 2001, Pages 891-894

  Robertson, T J ^a   Neild, A ^a   Hutchins, D A ^a   McIntosh, J S ^a   Billson, D R ^a   Noble, R A ^b   Davies, R R ^b   Koker, L ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b QINETIQ   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON NITRIDE; SUBSTRATES; ULTRASONIC MEASUREMENT; ULTRASONIC WAVES;

AIR-COUPLED MICROMACHINED TRANSDUCER; SOUND PRESSURE;

ULTRASONIC TRANSDUCERS;

EID: 0035731024     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991863     Document Type: Article

References (6)

1. NDE applications of air coupled ultrasonic transducers
2. Novel silicon nitride micromachined wide bandwidth ultrasonic transducers
3. Novel wide-bandwidth micromachined ultrasonic transducers
4. Miniature silicon micromachined ultrasonic point detectors for measurement of airborne radiated fields
5. Diffraction impulse response of rectangular transducers
6. Absorption of ultrasonic waves in air at high frequencies (10-20MHz)