Miniature silicon micromachined ultrasonic point detectors for measurement of airborne radiated fields

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 955-958

  Noble, R A ^a   Robertson, T J ^b   McIntosh, J S ^b   Hutchins, D A ^b   Billson, D R ^b  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ULTRASONIC POINT DETECTORS;

LOW TEMPERATURE OPERATIONS; MICROMACHINING; SENSITIVITY ANALYSIS; SILICON; ULTRASONIC TRANSDUCERS;

RADIATION DETECTORS;

EID: 0034579649     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2000.922699     Document Type: Article

References (3)

1. NDE applications of air coupled ultrasonic transducers
2. Development of a PVDF membrane hydrophone for use in air-coupled ultrasonic transducer calibration
3. Novel silicon nitride micromachined wide bandwidth ultrasnic transducers