SCOPUS 정보 검색 플랫폼

Volumn 308-310, Issue , 2001, Pages 13-17

Misfortune, challenge, and success: Defects in processed semiconductor devices

Author keywords

Device; Dislocation; Stress; Transmission electron microscopy

Indexed keywords

COMPUTER SIMULATION; DISLOCATIONS (CRYSTALS); DRY ETCHING; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY;

SILICIDATION DEFECTS;

SEMICONDUCTOR DEVICES;

EID: 0035673505 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4526(01)00652-4 Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.