Defect diagnostics in multicrystalline silicon using scanning techniques

Physica B: Condensed Matter

Volumn 308-310, Issue , 2001, Pages 1133-1136

  Tarasov, I ^a   Ostapenko, S ^a   Seifert, W ^b   Kittler, M ^b   Kaleis, J P ^c  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b IHP   (Germany)

^c ASE Americas Inc   (United States)

Author keywords

Dislocations; EBIC; Lifetime; Photoluminescence; Silicon

Indexed keywords

CONTAMINATION; CRYSTAL GROWTH; CRYSTAL IMPURITIES; CRYSTALLINE MATERIALS; DISLOCATIONS (CRYSTALS); ELECTRON BEAMS; PHOTOLUMINESCENCE; SCANNING; SOLAR CELLS;

MULTICRYSTALLINE SILICON;

SILICON WAFERS;

EID: 0035673007     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(01)00912-7     Document Type: Article

References (5)