Characterization of the electrical properties and thickness of thin epitaxial semiconductor layers by THz reflection spectroscopy

Journal of Applied Physics

Volumn 90, Issue 11, 2001, Pages 5778-5781

  Hashimshony, D ^a   Geltner, I ^a   Cohen, G ^a   Avitzour, Y ^a   Zigler, A ^a   Smith, C ^b  

^a HEBREW UNIVERSITY OF JERUSALEM   (Israel)

^b Sela Ltd   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL THICKNESS; REFLECTION SPECTROSCOPY; SEMICONDUCTOR LAYERS;

TERAHERTZ SPECTROSCOPY;

EID: 0035576090     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1412574     Document Type: Article

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