SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 673, Issue , 2001, Pages

"Reverse" stress relaxation in Cu thin films

(5) Spolenak, R a Volkert, C A a Ziegler, S a Panofen, C a Brown, W L a

a AGERE SYSTEMS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CREEP; METALLOGRAPHIC MICROSTRUCTURE; PLASTIC DEFORMATION; RESIDUAL STRESSES; SPUTTERING; STRAIN; STRESS RELAXATION; TEMPERATURE; TENSILE STRESS; THIN FILMS;

CONTROLLED GAS PRESSURE BULGING; PLASTIC STRAINING; RESONANCE FREQUENCY MEASUREMENT; REVERSE STRESS RELAXATION; SUBSTRATE CURVATURE MEASUREMENT;

METALLIC FILMS;

EID: 0035559711 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-673-p1.4 Document Type: Conference Paper

Times cited : (9)

References (13)

1
- 0000617359
- (1999) AIP Conf. Proc. , vol.491 , pp. 240-248
- Vinci, R.P.¹ Cornella, G.² Bravman, J.C.³

2
- 0001259780
- (1999) Rev. of Sci. Inst. , vol.70 , Issue.10 , pp. 4026-4031
- Kalkman, A.J.¹ Verbruggen, A.H.² Janssen, G.C.A.M.³ Groen, F.H.⁴

3
- 0026875270
- (1992) J. Mater. Res. , vol.7 , pp. 1553
- Vlassak, J.¹ Nix, W.D.²

4
- 0005917231
- in preparation
- (2001)
- Spolenak, R.¹ Ziegler, S.² Volkert, C.A.³ Boie, B.⁴ Kraus, J.⁵ Kossives, D.⁶ Brown, W.L.⁷

5
- 0032632468
- (1999) Proc. of the SPIE , vol.3676 , pp. 152-161
- Schlax, M.P.¹ Engelstad, R.L.² Lovell, E.G.³ Liddle, J.A.⁴ Novembre, A.E.⁵

6
- 0033261090
- (1999) J. of Vac. Sci. & Tech. B , vol.17 , Issue.6 , pp. 2714-2718
- Schlax, M.P.¹ Engelstad, R.L.² Lovell, E.G.³ Liddle, J.A.⁴ Novembre, A.E.⁵

7
- 0003969306
- Oxford University Press, London
- (1953) Dislocations and Plastic Flow in Crystals
- Cottrell, A.H.¹

8
- 0003753387
- Pergamon Press, Oxford
- (1982) Deformation Mechanism Maps
- Frost, H.J.¹ Ashby, M.F.²

9
- 0023312081
- IEEE Trans. Electr. Dev. , vol.ED-34 , Issue.3 , pp. 689-699
- Flinn, P.A.¹ Gardner, D.S.² Nix, W.D.³

10
- 0030507877
- J. Vac. Sci. Tech. A , vol.14 , Issue.4 , pp. 2454-2461
- Thouless, M.D.¹ Rodbell, K.P.² Cabral, C.J.³

11
- 0033327578
- (1999) Mat. Soc. Rec. Proc. , vol.562 , pp. 257-262
- Weiss, D.¹ Kraft, O.² Arzt, E.³

12
- 0033880206
- (2000) Acta Mater. , vol.48 , pp. 625-633
- Kobrinsky, M.J.¹ Thompson, C.V.²

13
- 0005992198
- in preparation
- MRS Fall Meeting 2000, Boston
- Spolenak, R.¹ Tamura, N.² Valek, B.³ MacDowell, A.A.⁴ Celestre, R.S.⁵ Brown, W.L.⁶ Bravman, J.C.⁷ Padmore, H.A.⁸ Marieb, T.⁹ Batterman, B.W.¹⁰ Patel, J.R.¹¹

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