Direct visualization of particle dynamics in model CMP geometries

Materials Research Society Symposium - Proceedings

Volumn 671, Issue , 2001, Pages

  Zettner, Claudia M ^a   Yoda, Minami ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; INTERFACES (MATERIALS); MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PARTICLES (PARTICULATE MATTER); REFRACTIVE INDEX; VISUALIZATION;

ELASTOMERIC PAD; PARTICLE DYNAMICS; TOTAL INTERNAL REFLECTION FLUORESCENCE;

CHEMICAL MECHANICAL POLISHING;

EID: 0035559558     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-671-m6.6     Document Type: Conference Paper

References (9)