SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 648, Issue , 2001, Pages P6431-P6436

Low temperature tungsten, tungsten carbide and tantalum carbide film growth

(7) Sun, Y M a Lee, S Y a Engbrecht, E R a Pfeifer, K a Smith, S a White, J M a Ekerdt, J G a

a The University of Texas at Austin (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; TANTALUM CARBIDE; TUNGSTEN CARBIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

LOW TEMPERATURE DEPOSITION;

FILM GROWTH;

EID: 0035557539 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (1)

References (13)

1
- 22644450444
- (1999) J. Vac. Sci. Technol. , vol.B 17 , pp. 1101
- Kelsey, J.E.¹ Goldberg, C.² Nuesca, G.³ Peterson, G.⁴ Kaloyeros, A.⁵ Arkles, B.⁶

2
- 0030214895
- (1996) Appl. Surf. Sci. , vol.99 , pp. 265
- Oku, T.¹ Kawakami, E.² Uekuho, M.³ Takahim, K.⁴ Yamaguchi, S.⁵ Murakumi, M.⁶

3
- 0000156618
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1511
- Ono, H.¹ Nakano, T.² Ohta, T.³

4
- 36449002563
- (1993) J. Appl. Phys. , vol.73 , pp. 300
- Clevenger, L.A.¹ Bojarczuk, N.A.² Holloway, K.³ Harper, J.M.E.⁴ Cabaral, C.⁵ Schad, R.G.⁶ Cardone, F.⁷ Stolt, L.⁸

5
- 0032121606
- (1998) J. Electrochem. Soc. , vol.145 , pp. 2538
- Wang, M.T.¹ Lin, Y.C.² Chen, M.C.³

6
- 0027884466
- (1993) Thin Solid Films , vol.236 , pp. 257
- Muranka, S.P.¹ Gutmann, R.J.² Kaloyeros, A.E.³ Lanford, W.A.⁴

7
- 0004066270
- Chapman & Ahll, New York
- (1997) Carbide, Nitride and Boride Materials Synthesis and Processing , pp. 639-664
- Weimer, A.W.¹

8
- 0031152731
- (1997) Thin Solid Films , vol.301 , pp. 142
- Imahori, J.¹ Oku, T.² Murakami, M.³

9
- 85010736385
- submitted
- Sun, Y.-M.¹ Lee, S.Y.² Lemonds, A.M.³ Engbrecht, E.R.⁴ Veldman, S.⁵ Lozano, J.⁶ White, J.M.⁷ Ekerdt, J.G.⁸ Emesh, I.⁹ Pfeifer, K.¹⁰

10
- 0003708256
- Published by Physical Electronics, U.S.A
- (1995) Handbook of X-ray Photoelectron Spectroscopy
- Chastin, J.¹ King, R.C.²

11
- 0001165209
- (1964) Can. J. Phys. , vol.42 , pp. 1256
- Rigby, L.J.¹

12
- 0000773513
- (1979) Surf. Sci. , vol.83 , pp. 181
- Chesters, M.A.¹ Hopkins, B.J.² Taylor, P.A.³ Winton, R.I.⁴

13
- 33751385415
- (1993) Chem. Mater. , vol.5 , pp. 614
- Fix, R.¹ Gordon, R.G.² Hoffman, D.M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.