Silicide formation for Ni and Pd bilayers on Si(100) substrates

Materials Research Society Symposium - Proceedings

Volumn 670, Issue , 2001, Pages

  Qu, Xin Ping ^a   Detavernier, C ^a   Van Meirhaeghe, R L ^a   Cardon, F ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ENTROPY; LATTICE CONSTANTS; NUCLEATION; SUBSTRATES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICIDES;

SILICON WAFERS;

EID: 0035556722     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-670-k6.10     Document Type: Conference Paper

References (15)