Where oxygen donor lives in microcrystalline silicon

Materials Research Society Symposium - Proceedings

Volumn 664, Issue , 2001, Pages

  Kamei, Toshihiro ^a   Wada, Takehito ^a   Matsuda, Akihisa ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CRYSTAL IMPURITIES; CRYSTALLINE MATERIALS; ELECTRONIC PROPERTIES; GRAIN BOUNDARIES; HIGH TEMPERATURE EFFECTS; IONIZATION; NITROGEN; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON;

POTENTIAL BARRIERS;

THIN FILMS;

EID: 0035556404     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)