Classification of impact-assisted etch mechanisms

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 387-390

  Van Delft, Falco C M J M ^a   Giesbers, J Ben ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ATOMIC PHYSICS; IONS; MAGNESIA; MOLECULAR PHYSICS; MULTILAYERS; QUARTZ; SILICON; ZIRCONIA;

IMPACT-ASSISTED ETCH MECHANISMS;

PLASMA ETCHING;

EID: 0000190612     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00089-6     Document Type: Article

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