Infrared frequency selective surfaces fabricated using optical lithography and phase-shift masks

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2757-2760

  Spector, S J ^a   Astolfi, D K ^a   Doran, S P ^a,c   Lyszczarz, T M ^a   Raynolds, J E ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b LOCKHEED MARTIN   (United States)

^c Corning Laserton ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ENERGY GAP; GOLD; LIGHT; LIGHT TRANSMISSION; MASKS; NATURAL FREQUENCIES; OPTICAL DESIGN; PHASE SHIFT; PHOTOLITHOGRAPHY; PHOTOVOLTAIC CELLS;

INFRARED FREQUENCY SELECTIVE SURFACES; INFRARED RESONANT WAVELENGTH; LIGHT INCIDENT ANGLE; PHASE SHIFT MASK; SMALLER RING STRUCTURES; THERMOVOLTAIC CELL;

OPTICAL DEVICES;

EID: 0035519455     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1420198     Document Type: Article

References (12)

1. E. L. Pelton and B. A. Munk, IEEE Trans. Antennas Propag. AP-22, 800 (1974).
2. S. W. Lee, IEEE Trans. Antennas Propag. AP-19, 656 (1971).
3. R. Ulrich, K. F. Renk, and L. Genzel, IEEE Trans. Microwave Theory Tech. MTT-11, 363 (1963).
4. R. Ulrich, Appl. Opt. 7, 1987 (1968).
5. Irina Puscasu, G. Boreman, R. C. Tiberia, D. Spencer, and R. R. Krchnavek, J. Vac. Sci. Technol. B 18, 3578 (2000).
6. M. D. Morgan, W. E. Horne, V. Sundaram, J. C. Wolfe, S. V. Pendharkar, and R. Tiberio, J. Vac. Sci. Technol. B 14, 3903 (1996).
7. T. K. Wu, Microwave Opt. Technol. Lett. 15, 9 (1997).
8. T. K. Wu, Frequency Selective Surface and Grid Array (Wiley, New York, 1995), pp. 2-9.
9. M. Fritze et al., J. Vac. Sci. Technol. B 18, 2886 (2000).
10. C. A. Mack, Proc. SPIE 538, 207 (1985).
11. B. A. Munk, R. J. Luebbers, and R. D. Fulton, IEEE Trans. Antennas Propag. AP-22, 804 (1974).
12. B. A. Munk, Frequency Selective Surfaces (Wiley, New York, 2000).