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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2753-2756

Patterning processes for fabricating sub-100 nm pseudo-spin valve structures

(6) Vögeli, Bernhard a Smith, Henry I a Castaño, Fernando J b Haratani, Susumu b,c Hao, Yaowu b Ross, C A b

a USA (United States)

b Massachusetts Institute of Technology Cambridge (United States)

c TDK CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; COPPER; ELECTRIC CONDUCTIVITY OF SOLIDS; LITHOGRAPHY; MAGNETIC FILMS; MAGNETIC PROPERTIES; MAGNETIC STORAGE; MAGNETIC VARIABLES MEASUREMENT; MULTILAYERS; NICKEL COMPOUNDS; RANDOM ACCESS STORAGE; REACTIVE ION ETCHING;

INTERFERENCE LITHOGRAPHY; ION MILLING; MAGNETIC RANDOM ACCESS MEMORY; PATTERNING PROCESS; PSEUDO SPIN VALVE;

NONVOLATILE STORAGE;

EID: 0035519133 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1415507 Document Type: Article

Times cited : (20)

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