Sacrificial anodic oxidation of 6H-Sic

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 11 A, 2001, Pages

  Kato, Masashi ^a   Ichimura, Masaya ^a   Arai, Eisuke ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

6H SiC; Anodic oxidation; Oxide film; Sacrificial oxidation

Indexed keywords

ANODIC OXIDATION; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; ELECTROLYTES; ETCHING; GLYCOLS; OHMIC CONTACTS; THERMOOXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ETHYLENE GLYCOLS; OHMIC CONTACT RESISTANCE;

SILICON CARBIDE;

EID: 0035517717     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.l1145     Document Type: Letter

References (13)