Alternative boron precursors for BGaAs epitaxy

Journal of Electronic Materials

Volumn 30, Issue 11, 2001, Pages 1387-1391

  Geisz, J F ^a   Friedman, D J ^a   Kurtz, S ^a   Reedy, R C ^a   Barber, G ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

BGaAs; Boron; GaAs; OMVPE

Indexed keywords

ALLOYS; COMPOSITION EFFECTS; METALLORGANIC VAPOR PHASE EPITAXY; SEMICONDUCTING BORON; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL EFFECTS;

BORON PRECURSORS;

BORON COMPOUNDS;

EID: 0035517203     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0188-7     Document Type: Article

References (11)