|
|
Volumn 16, Issue 10, 2001, Pages 3005-3008
|
|
Oxygen transport during annealing of Pb(Zr, Ti)O3 thin films in O2 gas and its effect on their conductivity
a
c
UNIV PARIS SUD
(France)
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
CRYSTALLIZATION;
CURRENT DENSITY;
DIFFUSION IN GASES;
FILM GROWTH;
LEAKAGE CURRENTS;
MAGNETRON SPUTTERING;
OXYGEN;
RAPID THERMAL ANNEALING;
SEMICONDUCTING LEAD COMPOUNDS;
STOICHIOMETRY;
TRANSPORT PROPERTIES;
RADIO-FREQUENCY-MAGNETRON SPUTTERING;
THIN FILMS;
|
|
EID: 0035494723
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.2001.0412 Document Type: Article |
|
Times cited : (11)
|
|
References (18)
|
