Large-area quartz glass microlens array fabricated by ion beam etching for focal plane detectors

Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

Volumn 18, Issue 2, 1999, Pages 100-101

  Xin Yu, Zhang ^a   Xin Jian, Y I ^a   Miao, H E ^a   Xing Rong, Zhao ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Ir focal plane structure; Refractive microlens array

Indexed keywords

EID: 33746732188     PISSN: 10019014     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. Gordon N T> Jones C L, and Purdy D J. Application of microlenses to infrared detector arrays Infrared phys. ,1991,31(6): 599-604
2. Bor-Yeu Tsaur, Chenson K. Chen, Susanne A.Marino. Heterojunction Ge,Sij-,/Si infrared detectors and focal plane arrays, Optical Engineering, 1994,33(1): 72-78