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Volumn 36, Issue 3, 2001, Pages 303-311

The electron temperature distribution of laser erosion plume after ablation of a tantalum target with excimer laser in vacuum

Author keywords

Ablation; Electron temperature; Laser; Tantalum

Indexed keywords

EXCIMER LASERS; PULSED LASER APPLICATIONS; TANTALUM; TEMPERATURE DISTRIBUTION; VACUUM APPLICATIONS;

EID: 0035452051     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(01)00043-4     Document Type: Article
Times cited : (6)

References (22)
  • 4
    • 36449007129 scopus 로고
    • On the origin of apatial nonuniformities in the composition of pulsed-laser-deposited films
    • (1991) J Appl Phys , vol.70 , pp. 5629
    • Saenger, K.L.1
  • 18
    • 0001562975 scopus 로고
    • On the effect of knudsen-layer formation on studies of vaporization, sputtering, and desorption
    • (1988) Surf Sci , vol.198 , pp. 263
    • Kelly, R.1    Dreyfus, R.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.