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Volumn 97, Issue 1-3, 1997, Pages 414-419
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Plasma state in pulsed arc, laser and electron deposition
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Author keywords
Arc plasma; High speed investigation; Laser plasma; Optical spectroscopy; PVD plasmas
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Indexed keywords
DEPOSITION;
ELECTRIC ARCS;
ELECTRIC SPARKS;
ELECTRON BEAMS;
IONIZATION OF SOLIDS;
LASER PRODUCED PLASMAS;
LASER PULSES;
MAGNETRON SPUTTERING;
PLASMA SOURCES;
OPTICAL SPECTROSCOPY;
PHYSICAL VAPOR DEPOSITION (PVD) PLASMAS;
PROTECTIVE COATINGS;
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EID: 0031368869
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00197-7 Document Type: Article |
Times cited : (14)
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References (13)
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