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Volumn 97, Issue 1-3, 1997, Pages 414-419

Plasma state in pulsed arc, laser and electron deposition

Author keywords

Arc plasma; High speed investigation; Laser plasma; Optical spectroscopy; PVD plasmas

Indexed keywords

DEPOSITION; ELECTRIC ARCS; ELECTRIC SPARKS; ELECTRON BEAMS; IONIZATION OF SOLIDS; LASER PRODUCED PLASMAS; LASER PULSES; MAGNETRON SPUTTERING; PLASMA SOURCES;

EID: 0031368869     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00197-7     Document Type: Article
Times cited : (14)

References (13)
  • 4
    • 0028671119 scopus 로고
    • High-current arc - A new source for high rate deposition
    • P. Siemroth, T. Schülke, T. Witke, High-current arc - a new source for high rate deposition, Surf. Coat. Technol. 68/69 (1994) 314.
    • (1994) Surf. Coat. Technol. , vol.68-69 , pp. 314
    • Siemroth, P.1    Schülke, T.2    Witke, T.3
  • 5
    • 0025680940 scopus 로고
    • The method of laser-sustained arc ignition
    • P. Siemroth, H.J. Scheibe, The method of laser-sustained arc ignition, IEEE Trans. Plasma Sci. 18 (6) (1990) 911.
    • (1990) IEEE Trans. Plasma Sci. , vol.18 , Issue.6 , pp. 911
    • Siemroth, P.1    Scheibe, H.J.2
  • 7
    • 0001521637 scopus 로고
    • The UV-visible spectroscopy of laser-produced aluminum plasmas
    • USA
    • J.T. Knudtson, W.B. Green, D.G. Sutton, The UV-visible spectroscopy of laser-produced aluminum plasmas, J. Appl. Phys. (USA) 61 (10) (1987) 4771.
    • (1987) J. Appl. Phys. , vol.61 , Issue.10 , pp. 4771
    • Knudtson, J.T.1    Green, W.B.2    Sutton, D.G.3
  • 8
    • 0345865356 scopus 로고
    • Properties and dynamics of a expanding erosion plasma produced by the UV radiation from an XeCl laser
    • D.V. Gaidarenko, A.G. Leonov, D.I. Chekhov, Properties and dynamics of a expanding erosion plasma produced by the UV radiation from an XeCl laser, Sov. J. Plasma Phys. 17 (1991) 534.
    • (1991) Sov. J. Plasma Phys. , vol.17 , pp. 534
    • Gaidarenko, D.V.1    Leonov, A.G.2    Chekhov, D.I.3
  • 10
    • 0026151943 scopus 로고
    • Optical emission diagnostics of laser-induced plasma for diamond-like film deposition
    • X. Chen, J. Mazumder, A. Purohit, Optical emission diagnostics of laser-induced plasma for diamond-like film deposition, Appl. Phys. A52 (1991) 328.
    • (1991) Appl. Phys. , vol.A52 , pp. 328
    • Chen, X.1    Mazumder, J.2    Purohit, A.3
  • 11
    • 0026984961 scopus 로고
    • Differential Measurement of absolute ion yield from laser-produced C plasma
    • K. Mann, K. Rohr, Differential Measurement of absolute ion yield from laser-produced C plasma, Laser Particle Beams 10 (3) (1992) 435.
    • (1992) Laser Particle Beams , vol.10 , Issue.3 , pp. 435
    • Mann, K.1    Rohr, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.