Tribological properties of bias voltage modulated a-C:H nanoscaled multilayers

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 521-524

  Knoblauch, L ^a   Hauert, R ^a   Savan, A ^b   Pfluger E ^b   Tixier, S ^c   Simmonds, M ^c   Swygenhoven, H V ^c   Mikhailov, S ^d  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b CSEM   (Switzerland)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

^d UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

a C:H; Interfaces; Multilayer; Tribology

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; HYDROGEN; HYDROGENATION; INTERFACES (MATERIALS); MECHANICAL PROPERTIES; PLASMA APPLICATIONS; RESIDUAL STRESSES; SUBSTRATES; TRIBOLOGY;

BIAS VOLTAGE MODULATION; PLASMA ACTIVATED CHEMICAL VAPOR DEPOSITION;

MULTILAYERS;

EID: 17544384817     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00460-X     Document Type: Article

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