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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2320-2327

Growth and structure of hyperthin SiO2 coatings on polymers

(4) Dennler, G a Houdayer, A a Segui Y b Wertheimer, M R a

a ÉCOLE POLYTECHNIQUE DE MONTRÉAL (Canada)

b Laboratoire Plasma et Conversion d'Energie (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FILM GROWTH; OPTICAL MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; REACTIVE ION ETCHING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICA; SUBSTRATES; THICK FILMS; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

HYPERTHIN COATINGS;

INORGANIC COATINGS;

EID: 0035442760 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1385911 Document Type: Article

Times cited : (45)

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