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Volumn 230, Issue 1-2, 2001, Pages 108-117
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Numerical investigation of the influence of EM-fields on fluid motion and resistivity distribution during floating-zone growth of large silicon single crystals
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Author keywords
A1. Computer simulation; A1. Convection; A1. Magnetic fields; A2. Floating zone technique; B2. Semiconducting silicon
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Indexed keywords
COMPUTATIONAL FLUID DYNAMICS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTROMAGNETIC FIELD EFFECTS;
HEAT CONVECTION;
SEMICONDUCTING SILICON;
SINGLE CRYSTALS;
RESISTIVITY DISTRIBUTION;
CRYSTAL GROWTH FROM MELT;
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EID: 0035426381
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)01323-9 Document Type: Conference Paper |
Times cited : (27)
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References (12)
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