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Volumn 216, Issue 1, 2000, Pages 204-219
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Influence of the three dimensionality of the HF electromagnetic field on resistivity variations in Si single crystals during FZ growth
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Author keywords
[No Author keywords available]
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Indexed keywords
BUOYANCY;
COMPOSITION EFFECTS;
COMPUTER SIMULATION;
CRYSTAL GROWTH FROM MELT;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTROMAGNETIC FIELD EFFECTS;
HYDRODYNAMICS;
MATHEMATICAL MODELS;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR GROWTH;
SINGLE CRYSTALS;
FLOATING ZONE GROWTH;
PHOTO-SCANNING METHOD;
SEMICONDUCTING SILICON;
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EID: 0033691504
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(00)00354-7 Document Type: Article |
Times cited : (40)
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References (14)
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