Computer simulation of void growth dynamics under the action of electromigration and capillary forces in narrow thin interconnects

Journal of Applied Physics

Volumn 90, Issue 3, 2001, Pages 1564-1572

  Ogurtani, Tarik Omer ^a   Oren, Ersin Emre ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035424075     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1382835     Document Type: Article

References (32)

1. W. D. Nix and E. Arzt, Metall. Trans. A 23A, 2007 (1992).
2. E. Arzt and W. D. Nix, J. Mater. Res. 6, 731 (1991).
3. J. E. Sanchez, O. Kraft, and E. Arzt, Appl. Phys. Lett. 61, 3121 (1992).
4. M. A. Korhonen, C. A. Paszkiet, and C. Y. Li, J. Appl. Phys. 69, 8083 (1991).
5. W. D. Nix, Metall. Trans. A 20A, 2217 (1989).
6. O. Kraft, U. E. Möckl, and E. Arzt, Quality and Reliability Eng. Int. 11, 279 (1995).
7. T. O. Ogurtani, Irreversible Thermodynamics of Curved Surfaces and Interphases with Singularities (unpublished).
8. O. Uysal, M.Sc. thesis, Middle East Technical University, 2000.
9. I. Prigogine, Thermodynamics of Irreversible Processes (Interscience, New York, 1961), pp. 28 and 34.
10. J. Bardeen and C. Herring, Atom Movements, edited by J. H. Hollomon (American Society for Metals, Cleveland, Ohio, 1951), p. 93.
11. Z. Suo, W. Wang, and M. Yang, Appl. Phys. Lett. 64, 1944 (1994).
12. W. Wang, Z. Suo, and T. H. Hao, J. Appl. Phys. 79, 2394 (1996).
13. S. R. De Groot, Thermodynamics of Irreversible Processes (North-Holland, New York, 1961), p. 98.
14. E. A. Guggenheim, Thermodynamics, 3rd ed. (North-Holland, Amsterdam, 1959), pp. 46 and 375.
15. A. S. Nowick and B. S. Berry, Anelastic Relaxation in Crystalline Solids (Academic, New York, 1972), p. 180.
16. R. Kirchheim, Acta Metall. Mater. 40, 309 (1992).
17. M. P. Surh, J. Appl. Phys. 85, 8145 (1999).
18. I. A. Blech, J. Appl. Phys. 47, 1203 (1976).
19. E. Kinsbron, I. A. Blech, and Y. Komem, Thin Solid Films 46, 139 (1977).
20. van der Waals and J. D. Baker, Handbook Experimental Physik (Springer-Verlag, Berlin, 1928), Vol. 6.
21. G. Beer and J. O. Watson, Introduction to Finite and Boundary Element Methods for Engineers (Wiley, New York, 1992), p. 151.
22. M. R. Gungor and D. Maroudas, J. Appl. Phys. 85, 2233 (1999).
23. E. E. Oren, M.Sc. thesis, Middle East Technical University, 2000.
24. METU/D-VoidSim (Dynamic Void Simulator) is accessible on the World Wide Web at http://www.csl.mete.metu.edu.tr/.
25. E. Arzt, O. Kraft, W. D. Nix, and J. E. Sanchez, J. Appl. Phys. 76, 1563 (1994).
26. A. L. Greer, http://www.msm.cam.ac.uk/mkg/e_mig.html.
27. Y. Chang Joo and C. V. Thompson, J. Appl. Phys. 81, 6062 (1997).
28. O. Kraft and E. Arzt, Acta Metall. 45, 1599 (1997).
29. T. O. Ogurtani, Metall. Trans. A 6A, 493 (1975).
30. T. O. Ogurtani, Metall. Trans. A 10A, 1505 (1979).
31. E. Kröner, Kontinuumstheorie der Vwersetzungen und Eigenspannungen (Springer, Berlin, 1958).
32. T. O. Ogurtani and A. K. Seeger, J. Appl. Phys. 55, 2857 (1984).