|
Volumn 40, Issue 8, 2001, Pages 1653-1660
|
One-grating projection for absolute three-dimensional profiling
a a a a |
Author keywords
Gratings; Profiling; Projection
|
Indexed keywords
DIFFRACTION GRATINGS;
INTERFEROMETRY;
MICROSCOPIC EXAMINATION;
PHASE MODULATION;
THREE-DIMENSIONAL PROFILING;
PROFILOMETRY;
|
EID: 0035414761
PISSN: 00913286
EISSN: None
Source Type: Journal
DOI: 10.1117/1.1385509 Document Type: Article |
Times cited : (30)
|
References (19)
|