Characterising the surface roughness of AFM grown SiO2 on Si

Microelectronics Reliability

Volumn 41, Issue 7, 2001, Pages 1077-1079

  Hill, D ^a   Blasco, X ^a   Porti, M ^a   Nafria M ^a   Aymerich, X ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC FILMS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SURFACE ROUGHNESS; ULTRATHIN FILMS;

ULTRATHIN DIELECTRICS;

SEMICONDUCTING FILMS;

EID: 0035394688     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(01)00078-6     Document Type: Article

References (7)